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FP-21T Precision Introduction Example

Prototyping Printed Board Making System For thin film patterning
on SrTiO3 substrates

Division of Nanoscale Science Institute for Solid State Physics, The University of Tokyo

FP-21T Precision
XYZ resolution : 1µm
Minimum milling width :

achieved for printed board 		50µm

Can we apply this for thin films on SrTiO3 substrates?

Hall bar and so on...




Difficulty No. 1

Detection of milling cutter contact with SrTiO3 substrate
Printed board is conductive due to surface thick metal layer (up to 10 µm) and can be detected by electric contact.
But SrTiO3 is insulator.
Even if conductive film is deposited, it is too thin for electric detection.


Image Detection





Difficulty No. 2

Milling of hard, fragile SrTiO3
Printed board is soft, which includes surface metal layer and plastic board

Milling parameters optimization
Milling parameters
Milling cutter diameter 50/100/150/200 µm
Rotation speed from 5 to 60 Krpm
Milling depth up to 5 µm
Lateral milling speed from 0.1 to 2 mm/s
etc.



Higer rotation speed does not necessarily lead to the fine finishes.



Parameters optimization summary

- Lower rotation speed is better
Although too low speed is unstable to hold constant speed 		Opt.: 20 Krpm
- Depth is not so critical
Although too deep results in shorter cutter life time
Opt.: up to 5 µm
- Lower lateral milling speed is better Min.: 0.1 mm/s
- Milling cutter diameter dependence is unknown Hopefully no dependence





Parameters optimization summary






Superiority of FP-21T Precision

- As the procedure of solid-state science -




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