| Fiducial positioning
30x/60x power magnifying camera
Position adjustment can easily be done by magnifying
the substrate surface accurately.
A substrate will be hold on the table surface by the
vacuum force. There are two types of Vacuum tables:
One is Popular model "VT-ABS" made of the plastic resin.
The other is Precision model "VTP-CRM" made of the ceramics
and suitable for a material as thin as 50µm.