Fiducial positioning
camera
30x/60x power magnifying camera
Position adjustment can easily be done by magnifying
the substrate surface accurately.
Vacuum Table
A substrate will be hold on the table surface by the
vacuum force. There are two types of Vacuum tables:
One is Popular model "VT-ABS" made of the plastic resin.
The other is Precision model "VTP-CRM" made of the ceramics
and suitable for a material as thin as 50µm.
Ring setter
You can adjust the protrution length of the drilling
bit from the bottom of the spindle motor.
Microscope with
LED Upright image
100 times magnification of a substrate surface with
the clear illumination of LED
